ʻO Titanium Disilicide, TiSi2

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ʻO Titanium Disilicide, TiSi2

Hana Titanium silicide: kūpale kūpale maikaʻi i ke ana wela, hoʻohana ʻia e like me nā mea kū wela, wela i ke kino wela wela, a pēlā aku.


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ʻO ka titanium silicide, ke kaupaona o ka mole: 116.1333, CAS No.: 12039-83-7, MDL No .: mfcd01310208

EINECS No .: 234-904-3.

Hana Titanium silicide: kūpaʻa kūpale maikaʻi i ke kiʻekiʻe wela, hoʻohana ʻia e like me nā mea kū wela, hoʻomehana wela wela, a me nā mea ʻē aʻe. Hoʻohana nui ʻia ka silanium titanium ma ka puka pā, kumuwaiwai / hoʻokahe, pilina a me nā pilina ohmic o ka semiconductor (MOS). metala oxide semiconductor kahua hopena transistor (MOSFET) a me ka hōʻeuʻeu ke komo ʻana i ka hoʻomanaʻo (DRAM)

1) Hoʻomākaukau ʻia kahi pale pale silhou titanium. Hāʻawi ka mea i ka hana hoʻomākaukau o ka titanium silicide pale pale me kahi ʻāpana non silicide a me kahi ʻāpana silicide i hoʻokaʻawale ʻia e kahi ʻāpana hoʻokaʻawale, a ua uhi ʻia ka ʻaoʻao luna o ka hāmeʻa me kahi ʻāpana oxide mōhai.

2) Kahi ʻano o ka in-situ synthesized titanium silicide (Ti5Si3) paukū i hoʻoikaika ʻia i ka titanium carbide (Ti3AlC2) kāhiko matrix i hoʻomākaukau ʻia. Hiki ke hoʻomākaukau ʻia ka alumini titanium carbide / titanium silicide mea hui pū me ka maʻemaʻe kiʻekiʻe a me ka ikaika kiʻekiʻe ma kahi mahana haʻahaʻa a me kahi manawa pōkole.

3) Hoʻomākaukau ʻia ka aniani silial i hana ʻia me ke aniani i uhi ʻia me ke aniani. Waiho ʻia kahi kiʻi ʻoniʻoni lahilahi ma luna o kahi substrate aniani lana maʻamau a i ʻole waiho ʻia kahi kiʻi silikone ma waena o lākou. Hiki ke hoʻomaikaʻi ʻia ka ikaika mechanical a me ke kūpaʻa kūpikū ʻino o ke aniani i uhi ʻia me ka hoʻomākaukau ʻana i ke kiʻi ʻoniʻoni o ka titanium silicide a me ka silicon carbide a i ʻole ka hoʻohui ʻana i kahi ʻāpana o carbon a nitrogen paha i loko o ke kiʻi ʻoniʻoni. Pili ka mea hou i kahi ʻano kīʻaha hou i hoʻopili ʻia e hoʻohui i nā hana o ke anuanu a me ka hoʻoneʻe wela a me ke aniani radiation haʻahaʻa. 4) Hoʻomākaukau ʻia kahi mea semiconductor, e komo pū ana me kahi substrate silikone, kahi e hoʻokumu ʻia ai kahi puka, kahi kumu a me kahi kahe. , ua hana ʻia kahi papa insulate ma waena o ka puka pā a me ka silicon substrate, haku ʻia ka puka o kahi papa polysilicon ma ka papa insulate a me kahi ʻāpana silikone titanium ma ka papa polysilicon, ua hoʻokumu ʻia kahi pale pale ma ka papa titanium silicide, a me ka pale papa, ka titanium silicide layer, ka polysilicon layer a me ka insulate layer e hoʻopuni ʻia e ʻEkolu mau papa o ka papa o ke ʻano, ʻo ia ka siliona nitride gap wall layer, hydrophilic layer and silicon oxide gap wall layer mai loko a i waho. Hoʻokumu ʻia ka titanium silicide layer ma ka electrode kumu a me ka electrode hoʻoheheʻe, ua hoʻokumu ʻia ka papa dielectric layer ma luna o ka silicon substrate, a ua hoʻokumu ʻia ka wehe puka aniani i ka papa dielectric layer o loko. Ma ke ʻimi ʻana i ka hoʻolālā ʻenehana, hiki i ke ʻano pono ke hoʻohana insulate pono i ka uila uila a me ka uea i loko o ka pukaaniani pili, a ʻaʻohe hanana pōkole keu.

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